Buckling of polysilicon microbeams during sacrificial layer removal

Journal of Micromechanics and Microengineering

Volumn 8, Issue 3, 1998, Pages 243-249

  Zhang, Tong Yi ^a   Zhang, Xin ^a   Zohar, Yitshak ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; BUCKLING; ETCHING; MICROFORMS; POLYSILANES; RESIDUAL STRESSES; SILICONES;

MICROBEAMS; POLYSILICONES;

BEAMS AND GIRDERS;

EID: 0032164543     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/3/011     Document Type: Article

References (6)

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2. Hutchinson J W, Thouless M D and Liniger E G 1992 Growth and configurational stability of circular, buckling-driven film delaminations Acta Metall. Mater. 40 295-308
3. Jensen II M and Thouless M D 1995 Buckling instability of straight edge cracks ASME Trans. J. Appl. Mech. 62 620-5
4. Vlassak J J and Nix W D 1992 A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films J. Mater. Res. 7 3242-9
5. Timoshenko S P and Gere J M 1961 Theory of Elastic Stability 2nd edn (Singapore: McGraw-Hill)
6. Zhang X, Zohar Y and Zhang T-Y Blister-like local buckling of polysilicon microbeams Int. Mechanical Engineering Congress Exposition (Anaheim, CA, 1998)