Fabrication of arrays of microlenses with controlled profiles using gray-scale microlens projection photolithography

Langmuir

Volumn 18, Issue 24, 2002, Pages 9312-9318

  Wu, Ming Hsien ^a   Park, Cheolmin ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GRAY LEVEL DISTRIBUTION; MICROLENS PROJECTION LITHOGRAPHY; MICROMETER SCALE IMAGES;

CRYSTAL MICROSTRUCTURE; ELASTOMERS; LIGHT SOURCES; MASKS; PHOTOLITHOGRAPHY; PHOTORESISTS;

MICROLENSES;

EID: 0037180681     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la015735b     Document Type: Article

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