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Volumn 71, Issue 26, 1997, Pages 3773-3775
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Imaging the irradiance distribution in the optical near field
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Author keywords
[No Author keywords available]
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Indexed keywords
CALCULATIONS;
DIFFRACTION;
LIGHT;
OPTIMIZATION;
PHOTORESISTS;
PHOTOSENSITIVITY;
IRRADIANCE DISTRIBUTION;
SUPERFICIAL DIFFRACTION;
PHOTOLITHOGRAPHY;
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EID: 0031373875
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.120502 Document Type: Article |
Times cited : (75)
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References (19)
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