Fabrication of frequency-selective surfaces using microlens projection photolithography

Applied Physics Letters

Volumn 80, Issue 19, 2002, Pages 3500-3502

  Wu, Ming Hsien ^a   Paul, Kateri E ^a   Yang, Jerry ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM EVAPORATION; FABRICATED ARRAYS; FEATURE SIZES; FREQUENCY-SELECTIVE; FREQUENCY-SELECTIVE SURFACES; MICRO-LENS; MICROPATTERNS; SINGLE EXPOSURE; SUBMICROMETERS;

ELECTROMAGNETIC WAVE ABSORPTION; ELECTRON BEAMS; FABRICATION; INFRARED RADIATION; PHOTORESISTS;

MICROLENSES;

EID: 79956022836     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1477941     Document Type: Article

References (17)

1. T. K. Wu, Frequency Selective Surface and Grid Array (Wiley, New York, 1995).
2. E. A. Parker, S. M. A. Hamdy, and R. J. Langley, Electron. Lett. 17, 880 (1981). ell ELLEAK 0013-5194
3. P. A. Krug, D. H. Dawes, R. C. McPhedran, W. Wright, J. C. Macfarlane, and L. B. Whitbourn, Opt. Lett. 14, 931 (1989). opl OPLEDP 0146-9592
4. S. Gupta, G. Tuttle, M. Sigalas, and K-M Ho, Appl. Phys. Lett. 71, 2412 (1997). apl APPLAB 0003-6951
5. K. D. Möller, J. B. Warren, J. B. Heaney, and C. Kotecki, Appl. Opt. 35, 6210 (1996). apo APOPAI 0003-6935
6. S. T. Chase and R. D. Joseph, Appl. Opt. 22, 1775 (1983). apo APOPAI 0003-6935
7. I. Puscasu, D. Spencer, and G. D. Boreman, Appl. Opt. 39, 1570 (2000). apo APOPAI 0003-6935
8. C. M. Rhoades, E. K. Damon, and B. A. Munk, Appl. Opt. 21, 2814 (1982). apo APOPAI 0003-6935
9. K. J. Kogler and R. G. Pastor, Appl. Opt. 27, 18 (1988). apo APOPAI 0003-6935
10. D. M. Byrne, A. J. Brouns, F. C. Case, R. C. Tiberio, B. L. Whitehead, and E. D. Wolf, J. Vac. Sci. Technol. B 3, 268 (1985). jvb JVTBD9 0734-211X
11. M. D. Morgan, W. E. Horne, V. Sundaram, J. C. Wolfe, S. V. Pendharkar, and R. Tiberio, J. Vac. Sci. Technol. B 14, 3903 (1996). jvb JVTBD9 0734-211X
12. K. E. Paul, C. Zhu, J. C. Love, and G. M. Whitesides, Appl. Opt. 40, 4557 (2001). apo APOPAI 0003-6935
13. J. C. Love, K. E. Paul, and G. M. Whitesides, Adv. Mater. 13, 604 (2001). amt ADVMEW 0935-9648
14. M.-H. Wu, and G. M. Whitesides, Appl. Phys. Lett. 78, 2273 (2001). apl APPLAB 0003-6951
15. M.-H. Wu, K. E. Paul, and G. M. Whitesides, Appl. Opt. 41, 2575 (2002). apo APOPAI 0003-6935
16. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, Appl. Phys. Lett. 70, 2658 (1997). apl APPLAB 0003-6951
17. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, J. Vac. Sci. Technol. B 16, 59 (1998). jvb JVTBD9 0734-211X