Patterning flood illumination with microlens arrays

Applied Optics

Volumn 41, Issue 13, 2002, Pages 2575-2585

  Wu, Ming Hsien ^a   Paul, Kateri E ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOODLIGHTING; GRAIN BOUNDARIES; LIGHT SOURCES; PHOTORESISTS; SELF ASSEMBLY;

OPTICAL PATTERNS;

MICROLENSES;

EID: 0036575430     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.002575     Document Type: Article

References (42)

1. D. M. Byrne, A. J. Brouns, F. C. Case, R. C. Tiberio, B. L. Whitehead, and E. D. Wolf, “Infrared mesh filters fabricated by electron-beam lithography,” J. Vac. Sci. Technol. B 3, 268 -271 (1985).
2. E. A. Parker, S. M. A. Hamdy, and R. J. Langley, “Arrays of concentric rings as frequency selective surfaces,” Electron. Lett. 17, 880-881 (1981).
3. K. J. Kogler and R. G. Paster, “Infrared filters fabricated from submicron loop antenna arrays,” Appl. Opt. 27, 18-19 (1988).
4. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals (Princeton University, Princeton, N.J., 1995).
5. C. Berger, N. Collings, R. Vokel, M. T. Gale, and T. Hessler, “A microlens-array-based optical neural network application,” Pure Appl. Opt. 6, 683-689 (1997).
6. J. Schwider, W. Stork, N. Streibl, and R. Vokel, “Possibilities and limitations of space-variant holographic optical elements for switching networks and general interconnections,” Appl. Opt. 31, 7403-7410 (1992).
7. R. Vokel, H. P. Herzig, P. Nussbaum, W. Singer, R. Dandliker, and W. B. Hugle, “Microlens lithography: a new approach for large display fabrication,” Microelectron. Eng. 30, 107-110 (1996).
8. M. Ida, B. Montmayeul, and R. Meyer, “New microlithography technique for large size field emission displays,” in Euro Display’96: International Display Research Conference (American Society for International Science and Technology, Silver Spring, Md., 1996), pp. 177-180.
9. W. M. Moreau, Semiconductor Lithography (Plenum, New York, 1989), Chap. 8.
10. R. Dandliker, S. Gray, F. Clube, H. P. Herzig, and R. Vo kel, “Non-conventional techniques for optical lithography,” Microelectron. Eng. 27, 205-211 (1995).
11. S. M. Sze, VLSI Technology (McGraw-Hill, Singapore, 1988), Chap. 4.3.
12. M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief micro-optical elements by direct laser writ-ing in photoresist,” Opt. Eng. 33, 3556-3566 (1994).
13. S. Hayashi, Y. Kumamoto, T. Suzuki, and T. Hirai, “Imaging by polystyrene latex particles,” J. Colloid Interface Sci. 144, 538-547 (1991).
14. M.-H. Wu and G. M. Whitesides, “Fabrication of arrays of two-dimensional micropatterns using microspheres as micro-lenses for projection photolithography,” Appl. Phys. Lett. 78, 2273-2275 (2001).
15. P. Nussbaum, R. Vokel, H. P. Herzig, M. Eisner, and S. Ha-selbeck, “Design, fabrication, and testing of microlens arrays for sensors and microsystems,” Pure Appl. Opt. 6, 617-636 (1997).
16. H. A. Biebuyck and G. M. Whitesides, “Self-organization of organic liquids on patterned self-assembled monolayers of al-kanethiolates on gold,” Langmuir 10, 2790-2793 (1994).
17. Y. Lu, Y. Yin, and Y. Xia, “A self-assembly approach to the fabrication of patterned, two-dimensional arrays of micro-lenses of organic polymers,” Adv. Mater. 13, 34-37 (2001).
18. H. C. van de Hulst, Light Scattering by Small Particles (Dover, New York, 1981).
19. M. Kerker, The Scattering of Light and Other Electromagnetic Radiation (Academic, New York, 1969).
20. M. Born, and E. Wolf, Principles of Optics, 6th ed. (Pergamon, New York, 1980), Chap. 13.5.
21. C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, New York, 1983).
22. M. Sasaki, T. Kurosawa, and K. Hane, “Micro-objective ma-nipulated with optical tweezers,” Appl. Phys. Lett. 70, 785-787 (1997).
23. M. E. J. Friese, A. G. Truscott, H. Rubinsztein-Dunlop, and N. R. Heckenberg, “Three-dimensional imaging with optical tweezers,” Appl. Opt. 38, 6597-6603 (1999).
24. J. P. Brody and S. R. Quake, “A self-assembled microlensing rotational probe,” Appl. Phys. Lett. 74, 144-146 (1999).
25. T. Yamasaki and T. Tsutusi, “Fabrication and optical proper-ties of two-dimensional ordered arrays of silica microspheres,” Jpn. J. Appl. Phys. 38, 5916-5921 (1999).
26. R. D. Pradhan, J. A. Bloodgood, and G. H. Watson, “Photonic band structure of bcc colloidal crystals,” Phys. Rev. B 55,9503-9507 (1997).
27. J. A. Rogers, K. E. Paul, and G. M. Whitesides, “Qualifying distortion in soft lithography,” J. Vac. Sci. Technol. B 16, 88-97 (1998).
28. J. Aizenberg, J. A. Rogers, K. E. Paul, and G. M. Whitesides, “Imaging profiles of light intensity in the near field: application to phase-shift photolithography,” Appl. Opt. 37, 2145-2152 (1998).
29. J. A. Rogers, O. J. A. Schueller, C. Marzolin, and G. M. Whi-tesides, “Wave-front engineering by use of transparent elasto-meric optical elements,” Appl. Opt. 36, 5792-5795 (1997).
30. J. A. Rogers, K. E. Paul, R. J. Jackman, and G. M. Whitesides, “Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field,” Appl. Phys. Lett. 70, 2658-2660 (1997).
31. Z. L. Liau, D. E. Mull, C. L. Dennis, R. C. Williamson, and R. G. Waarts, “Large-numerical-aperture microlens fabrication by one-step etching and mass-transport smoothing,” Appl. Phys. Lett. 64, 1484-1486 (1994).
32. A. Schilling, R. Merz, C. Ossmann, and H. P. Herzig, “Surface profiles of reflow microlenses under the influence of surface tension,” Opt. Eng. 39, 2171-2176 (2000).
33. C. B. Gorman, H. A. Biebuyck, and G. M. Whitesides, “Use of a patterned self-assembled monolayer to control the formation of a liquid resist pattern on a gold surface,” Chem. Mater. 7, 252-254 (1995).
34. E. Kim, G. M. Whitesides, L. K. Lee, S. P. Smith, and M. Prentiss, “Fabrication of arrays of channel waveguides by self-assembly using patterned organic monolayers as templates,” Adv. Mater. 8, 139-142 (1996).
35. A. Kumar and G. M. Whitesides, “Patterned condensation fig-ures as optical diffraction gratings,” Science 263, 60-62 (1994).
36. Y. Xia, E. Kim, X.-M. Zhao, J. A. Rogers, M. Prentiss, and G. M. Whitesides, “Complex optical surfaces formed by replica mold-ing against elastomeric masters,” Science 273, 347-349 (1996).
37. E. Kim, Y. Xia, X.-M. Zhao, and G. M. Whitesides, “Solvent-assisted microcontact molding: a convenient method for fabricating three-dimensional structures on surfaces of polymers,” Adv. Mater. 9, 651-654 (1997).
38. N. D. Denkov, O. D. Velev, P. A. Kralchevsky, I. B. Ivanov, H. Yoshimura, and K. Nagayama, “Mechanism of formation of two-dimensional crystals from latex particles on substrates,” Langmuir 8, 3183-3190 (1992).
39. J. L. Wilbur, R. J. Jackman, and G. M. Whitesides, “Elasto-meric optics,” Chem. Mater. 8, 1380-1385 (1996).
40. T. K. Wu, Frequency Selective Surface and Grid Array (Wiley, New York, 1995).
41. V. Dhayalan, T. Standnes, J. Stamens, and H. Heler, “Scalar and electromagnetic diffraction point-spread functions for high-NA microlenses,” Pure Appl. Opt. 6, 603-615 (1997).
42. C. Van Berkel, B. P. McGarvey, and J. A. Clarke, “Microlens arrays for 2D large area image sensors,” Pure Appl. Opt. 3, 177-182 (1994).