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Thin Solid Films

Volumn 413, Issue 1-2, 2002, Pages 59-64

Local structure and bonds of amorphous silicon oxynitride thin films

(4) Scopel, W L a Fantini, M C A a Alayo, M I a Pereyra, I a

a UNIVERSITY OF SÃO PAULO (Brazil)

Author keywords

Plasma processing and deposition; Silicon nitride; Silicon oxide; Structural properties

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; COMPOSITION EFFECTS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; X RAY ANALYSIS;

LOCAL STRUCTURE;

THIN FILMS;

EID: 0037166605 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00346-2 Document Type: Article

Times cited : (45)

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