Composition-density and refractive index relations in PECVD silicon oxynitrides thin films

Journal of the European Ceramic Society

Volumn 17, Issue 15-16, 1997, Pages 2001-2005

  Viard, Jocelyn ^a   Berjoan, René ^b   Durand, Jean ^a  

^a CNRS   (France)

^b Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001678298     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0955-2219(97)00082-4     Document Type: Article

References (20)

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