Improvement of the structural properties of near stoichiometric PECVD SiO2

Brazilian Journal of Physics

Volumn 27, Issue 4, 1997, Pages 146-149

  Alayo, Marco I ^a   Pereyra, Inés ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031325235     PISSN: 01039733     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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