Two-dimensional laser-induced fluorescence imaging of metastable density in low-pressure radio frequency argon plasmas with added O2, Cl22, and CF4

Journal of Applied Physics

Volumn 79, Issue 1, 1996, Pages 77-85

  McMillin, Brian K ^a,b,c   Zachariah, M R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NATIONAL RESEARCH COUNCIL   (United States)

^c LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON TETRACHLORIDE; CHLORINE; COMPOSITION EFFECTS; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; ELECTRONS; EMISSION SPECTROSCOPY; FLUORESCENCE; IMAGING TECHNIQUES; OXYGEN;

ELECTRONEGATIVITY; LASER INDUCED FLUORESCENCE; LOW PRESSURE RADIOFREQUENCY PLASMAS; METASTABLE DENSITY; SPATIAL DISTRIBUTION;

PLASMA DENSITY;

EID: 0029732254     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360793     Document Type: Article

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