Spectroscopic infrared ellipsometry to determine the structure of layered samples

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 57, Issue 10, 2002, Pages 1625-1634

  Korte, Ernst Heiner ^a   Hinrichs, Karsten ^a   Röseler, Arnulf ^a  

^a ISAS INSTITUTE FOR ANALYTICAL SCIENCES   (Germany)

Author keywords

Ellipsometry; Infrared; Structural analysis; Surface analysis; Thin films

Indexed keywords

CHARACTERIZATION; ELLIPSOMETRY; INFRARED RADIATION; MOLECULES; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; SPECTRUM ANALYSIS; SURFACE STRUCTURE; THICKNESS MEASUREMENT; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

SPECTROSCOPIC INFRARED ELLIPSOMETRY;

INFRARED SPECTROSCOPY;

EID: 0037107365     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(02)00100-3     Document Type: Article

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