Effects of top electrode annealing on the PZT thin films

Integrated Ferroelectrics

Volumn 16, Issue 1-4, 1997, Pages 165-174

  Lee, Eun Gu ^a   Wouters, Dirk J ^b   Willems, Geert ^b   Maes, Herman E ^b  

^a Chosun University   (South Korea)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC FIELDS; ELECTRODES; FERROELECTRIC MATERIALS; HYSTERESIS; LEAD COMPOUNDS; POLARIZATION; REACTIVE ION ETCHING; REMANENCE; SPUTTERING; THERMAL EFFECTS; THIN FILMS;

LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0031377370     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708013038     Document Type: Article

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