Orientation control of rhomboedral PZT thin films on Pt/Ti/SiO2/Si substrates

EPJ Applied Physics

Volumn 15, Issue 3, 2001, Pages 153-165

  Vilquin, B ^a   Bouregba, R ^a   Poullain, G ^a   Hervieu, M ^a   Murray, H ^a  

^a UNIVERSITÉ DE CAEN   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; CRYSTALLIZATION; FERROELECTRICITY; FILM GROWTH; MAGNETRON SPUTTERING; PHASE COMPOSITION; SPUTTER DEPOSITION; SUBSTRATES; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY;

BUFFER LAYER; FILM ORIENTATION; ORIENTATION CONTROL; RHOMBOEDRAL THIN FILMS;

LEAD COMPOUNDS;

EID: 0035442479     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2001177     Document Type: Article

References (15)