Characterisation of PZT films of differing orientations for MEMS applications

Ferroelectrics

Volumn 224, Issue 1-4, 1999, Pages 259-266

  Jenkins, D F L ^a   Clegg, W W ^a   Velu, G ^b   Cattan, E ^b   Remiens, D ^b  

^a UNIVERSITY OF PLYMOUTH   (United Kingdom)

^b UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; LEAD COMPOUNDS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON;

ACTUATION EFFICIENCY; LEAD ZIRCONATE TITANATE; MICRO ELECTRO MECHANICAL SYSTEM; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC THIN FILMS; PLATINISED SILICON; POLING PROCESS;

THIN FILMS;

EID: 0033086611     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199908210575     Document Type: Article

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