Diamond and diamond-like carbon films

Vacuum

Volumn 52, Issue 1-2, 1999, Pages 133-139

  Esteve, J ^a   Polo, M C ^a   Sanchez G ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; DIAMOND FILMS; FILM GROWTH; FILM PREPARATION; FRICTION; HARDNESS; ION BOMBARDMENT; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; TRANSPARENCY; WEAR RESISTANCE;

DIAMOND LIKE CARBON (DLC) FILMS; HOT FILAMENT CHEMICAL VAPOR DEPOSITION;

PROTECTIVE COATINGS;

EID: 0032762712     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00231-0     Document Type: Article

References (35)

1. Vohler OJ, von Sturm F, Wege E. Encyclopedia of Applied Physics, Vol. 3. 1992, p. 21.
2. Yashiki T, Nakamura T, Fujimori N, Nakai T. Proc. Int. Conf. on Metallurgical Coatings and Thin Films. San Diego, California, 1991.
3. Kamo M, Sato Y, Matsumoto S, Setaka N. J. Crys. Growth 1983;62:642.
4. Ravi KV, Joshi A. Appl. Phys. Lett. 1991;58:246.
5. Zhu W, Stoner BR, Williams BE, Glass JT. Proc. of IEEE 1991;79:621.
6. Robertson J. Adv. Phys. 1986;35:317.
7. Kim DS, Fisher TE, Gallois S. Surf. Coat. Technol. 1991;49:537.
8. Moravec TJ, Lee JC. J. Vac. Sci. Technol. 1982;20:338.
9. Bubenzer A, Dischler B, Brandt G, Koidl P. J. Appl. Phys. 1983;54:4590.
10. Spitsyn BV, Bouilov LL, Derjaguin BV. J. Crys. Growth. 1981;52:219.
11. Kamo M, Sato U, Matsumoto S, Setaka N. J. Crystal. Growth 1983;62:642.
12. Koidl P, Wild C, Dischler B, Wagner J, Ramsteiner M. Mater. Sci. Forum 1990;52:41.
13. Angus JC, Hayman CC. Science 1988;241:913.
14. Denning PA, Stevenson DA. Application of Diamond Films and Related Materials, Amsterdam: Elsevier, 1991, p. 383.
15. Dubray JJ, Pantano CG, Meloncelli M, Bertran E. J. Vac Sci. Technol. 1991;A9(6):3012.
16. Lin ST, Lee SL, Hwang J, Lin TS. J. Electrochem. Soc. 1992;139:3255.
17. Yugo S, Kanai T, Kimura T, Muto T. Appl. Phys. Lett. 1991;58:1036.
18. Moulin S, Bonnot AM. Diamond Relat. Mater. 1994;3:577.
19. Sanchez G, Servat J, Gorostiza P, Polo MC, Wang WL, Esteve J. Diamond Relat. Mater. 1996;5:592.
20. Stoner BR, Ma G-HM, Wolter SD, Glass JT. Phys. Rev. B 1992;45:11067.
21. Lee YH, Richard PD, Bachmann KJ, Glass JT. Appl. Phys. Lett. 1995;56:1853.
22. Dotty FP, Jesser WA. J. Electron. Mater. 1991;20:121.
23. Zhu W, Sivazlian FR, Stoner BR, Glass JT. J. Mater. Res. 1995;10:425.
24. Chen Q, Yang J, Lin Z. Appl. Phys. Lett. 1995;67:1853.
25. Yugo S, Kimura T, Kanai T. Diamond Relat. Mater. 1992;2:328.
26. Stoner BR, Ma GH, Wolter SD, Zhu W, Wang Y-C, Davis RF, Glass JT. Diamond Relat. Mater. 1993;2:142.
27. Robertson J, Gerber J, Sattel S, Jung K, Ehrhardt H. Appl. Phys. Lett. 1995;66:3287.
28. Wang WL, Sanchez G, Polo MC, Zhang RQ, Esteve J. Appl. Phys. A, 1997 (in press).
29. Sanchez G, Polo MC, Wang WL, Esteve J. Proc. of the MRS Fall Meeting, Boston, 1995.
30. Sanchez G, Wang WL, Polo MC, Esteve J. Diamond and Relat. Mater., 1997 (in press).
31. Geis MW, Tamor MA. Encyclopedia of Applied Physics Vol. 5, VCH Publishers, 1993.
32. Maass F, Bertomeu J, Asensi JM, Puigdollers J, Andreu J, Delgado JC, Esteve J. Applied Surface Science 1993;70/71:768.
33. Serra C, Pascual E, Maass F, Esteve J. Surface and Coatings Technology 1991;47:89.
34. Pascual E, Serra C, Esteve J, Bertran E. Surface and Coatings Technology 1991;47:263.
35. Serra C, Pascual E, Maass F, Bertran E, Esteve J. Diamond and Related Materials 1992;1:538.