Analysis of the ellipsometric spectra of amorphous carbon thin films for evaluation of the sp3-bonded carbon content

Diamond and Related Materials

Volumn 7, Issue 7, 1998, Pages 999-1009

  Lee, Joungchel ^a   Collins, R W ^a   Veerasamy, V S ^b   Robertson, J ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Cathodic arc deposition; Optical properties; Sp3 bonded carbon; Spectroscopic ellipsometry; Tetrahedral amorphous carbon

Indexed keywords

AMORPHOUS FILMS; CARBON; ELECTRIC ARCS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; ELLIPSOMETRY; ION BEAMS;

CARBON FILMS; CATHODIC ARC DEPOSITION;

THIN FILMS;

EID: 0032116208     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00341-5     Document Type: Article

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