Characterization of diamond-like carbon by Raman spectroscopy, XPS and optical constants

Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 397-401

  Moßner C ^a,c   Grant, P ^b   Tran, H ^b   Clarke, G ^b   Lockwood, D J ^b   Labbe H J ^b   Mason, B ^b   Sproule, I ^b  

^a Ceramics Laboratory Ecole Polytechnique Federale de Lausanne   (Switzerland)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c IPT Ionen und Plasmatechnik   (Germany)

Author keywords

Diamond like carbon; Ellipsometry; Raman; XPS

Indexed keywords

CARBON; CHARACTERIZATION; CHEMICAL BONDS; ELECTRON EMISSION; ELLIPSOMETRY; EXCIMER LASERS; HARDNESS; LASER ABLATION; OPTICAL PROPERTIES; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL INERTNESS; DIAMOND LIKE CARBON FILM; FIELD EMISSION DISPLAY; OPTICAL CONSTANT; VICKERS HARDNESS;

THIN FILMS;

EID: 0032048375     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00630-5     Document Type: Article

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