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Surface Science

Volumn 496, Issue 3, 2002, Pages 196-208

Atomistic simulation of stress effects in a-Si due to low-energy Si impact

(2) Koster, Monika a Urbassek, Herbert M a

a Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

Amorphous thin films; Computer simulations; Ion bombardment; Ion solid interactions; Molecular dynamics; Silicon

Indexed keywords

AMORPHOUS FILMS; COMPRESSIVE STRESS; COMPUTER SIMULATION; ION BOMBARDMENT; MOLECULAR DYNAMICS; SEMICONDUCTING SILICON;

AMORPHOUS THIN FILMS; ATOMISTIC SIMULATIONS;

THIN FILMS;

EID: 0037050228 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(01)01608-9 Document Type: Article

Times cited : (11)

References (49)

1
- 0008071590
- Ion beam assisted film growth, Elsevier, Amsterdam
- (1989) Beam modification of materials , vol.3
- Itoh, T.¹

2
- 0000886185
- J.W. Rabalais (Ed.), Wiley, Chichester
- (1994) Low Energy Ion-Surface Interactions , pp. 481
- Marton, D.¹

3
- 0003816217
- Cambridge University Press, Cambridge
- (1996) Ion-Solid Interactions: Fundamentals and Applications
- Nastasi, M.¹ Mayer, J.W.² Hirvonen, J.K.³

4
- 0003667033
- Springer, Berlin
- (1984) Thin Film and Depth Profile Analysis
- Oechsner, H.¹

5
- 0003666038
- Noyes, Park Ridge
- (1990) Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface interactions
- Rossnagel, S.M.¹

6
- 0000464473
- (1997) J. Appl. Phys. , vol.81 , pp. 6513
- Chason, E.¹ Picraux, S.T.² Poate, J.³ Diaz de la Rubia, T.⁴ Mayer, J.W.⁵

7
- 0003469709
- Low-energy ion irradiation of solid surfaces
- Springer, Berlin
- (1999) Springer Tracts in Modern Physics , vol.146
- Gnaser, H.¹

8
- 0029779090
- (1996) Thin Solid Films , vol.272 , pp. 271
- Kitabatake, M.¹ Greene, J.E.²

9
- 0000634645
- (1995) Phys. Rev. B , vol.51 , pp. 5061
- Strickland, B.¹ Roland, C.²

10
- 33144475026
- (1992) Phys. Rev. B , vol.45 , pp. 1507
- Ramana Murty, M.V.¹ Atwater, H.A.²

11
- 0001268548
- (1999) Phys. Rev. Lett. , vol.83 , pp. 4788
- Kyuno, K.¹ Cahill, D.G.² Averback, R.S.³ Tarus, J.⁴ Nordlund, K.⁵

12
- 0001619367
- (1998) Phys. Rev. B , vol.57 , pp. 4756
- Hensel, H.¹ Urbassek, H.M.²

13
- 0000800009
- (1997) Appl. Phys. Lett. , vol.70 , pp. 3103
- Nordlund, K.¹ Averback, R.S.²

14
- 0001684306
- (1995) Nucl. Instrum. Meth. B , vol.102 , pp. 301
- Rubio, J.E.¹ Marqués, L.A.² Jaraíz, M.³ Bailón, L.A.⁴ Barbolla, J.⁵

15
- 0030563532
- (1996) Nucl. Instrum. Meth. B , vol.112 , pp. 156
- Rubio, J.E.¹ Marqués, L.A.² Pelaz, L.³ Jaraíz, M.⁴ Barbolla, J.⁵

16
- 0033516056
- (1999) Nucl. Instrum. Meth. B , vol.153 , pp. 378
- Tarus, J.¹ Nordlund, K.² Sillanpää, J.³

17
- 0034667145
- (2000) Phys. Rev. B , vol.62 , pp. 11219
- Koster, M.¹ Urbassek, H.M.²

18
- 0000620321
- (1995) Phys. Rev. B , vol.52 , pp. 5685
- Djordjevic, R.R.¹ Thorpe, M.F.² Wooten, F.³

19
- 0000598639
- (1998) Phys. Rev. Lett. , vol.80 , pp. 1928
- Dong, J.¹ Drabold, D.A.²

20
- 0003050540
- (1987) Sol. State Phys. , vol.40 , pp. 1
- Wooten, F.¹ Weaire, D.²

21
- 29144453140
- (1966) Phys. Rev. , vol.145 , pp. 637
- Keating, P.N.¹

22
- 7544236735
- parameter set C
- (1988) Phys. Rev. B , vol.38 , pp. 9902
- Tersoff, J.¹

23
- 33748850018
- (1992) Phys. Rev. B , vol.46 , pp. 2250
- Balamane, H.¹ Halicioglu, T.² Tiller, W.A.³

24
- 0003412161
- J.F. Ziegler (Ed.), Pergamon Press, New York
- (1985) Stopping Powers and Ranges of Ions in Matter , vol.1
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

25
- 0001097625
- (1999) Phys. Rev. B , vol.60 , pp. 12610
- Beardmore, K.M.¹ Grønbech-Jensen, N.²

26
- 4243754961
- (1985) Phys. Rev. B , vol.31 , pp. 5262
- Stillinger, F.H.¹ Weber, T.A.²

27
- 0000198022
- (1989) Phys. Rev. Lett. , vol.62 , pp. 1290
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³

28
- 32144459568
- (1990) Phys. Rev. B , vol.41 , pp. 10468
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³ Eckstein, W.⁴

29
- 0030647305
- (1997) Radiat. Eff. Defects Solids , vol.141 , pp. 185
- Uhlmann, S.¹ Frauenheim, T.² Boyd, K.J.³ Marton, D.⁴ Rabalais, J.W.⁵

30
- 0035878710
- (2001) J. Appl. Phys. , vol.90 , pp. 689
- Koster, M.¹ Urbassek, H.M.²

31
- 0142182473
- (1995) Phys. Rev. Lett. , vol.74 , pp. 2507
- Diaz de la Rubia, T.¹ Gilmer, G.H.²

32
- 0032118007
- (1998) Nucl. Instrum. Meth. B , vol.142 , pp. 287
- Hensel, H.¹ Urbassek, H.M.²

33
- 0001278985
- (1994) Phys. Rev. B , vol.49 , pp. 16953
- Miller, L.A.¹ Brice, D.K.² Prinja, A.K.³ Picraux, S.T.⁴

34
- 0001337035
- (1998) Phys. Rev. B , vol.58 , pp. 9907
- Tarus, J.¹ Nordlund, K.² Kuronen, A.³ Keinonen, J.⁴

35
- 0032065941
- (1998) Nucl. Instrum. Meth. B , vol.141 , pp. 61
- Windl, W.¹ Lenosky, T.J.² Kress, J.D.³ Voter, A.F.⁴

36
- 0008068744
- Ph.D. Thesis, University Kaiserslautern
- (2000)
- Koster, M.¹

37
- 0010005593
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

38
- 0027578647
- (1993) Thin Solid Films , vol.226 , pp. 30
- Davis, C.A.¹

39
- 0000721676
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 1928
- McKenzie, D.R.¹

40
- 0043059594
- (1993) Diamond Rel. Mater. , vol.2 , pp. 984
- Robertson, J.¹

41
- 0001319542
- (1996) Phys. Rev. B , vol.53 , pp. 4117
- Marks, N.A.¹ McKenzie, D.R.² Pailthorpe, B.A.³

42
- 0001680296
- (1997) Phys. Rev. B , vol.56 , pp. 2441
- Marks, N.A.¹

43
- 0003127712
- R. Behrisch (Ed.), Springer, Berlin
- (1981) Sputtering by Particle Bombardment , vol.1 , pp. 9
- Sigmund, P.¹

44
- 36749119249
- (1974) Appl. Phys. Lett. , vol.25 , pp. 169
- Sigmund, P.¹

45
- 0014465023
- (1969) Appl. Phys. Lett. , vol.14 , pp. 114
- Sigmund, P.¹

46
- 4243729400
- Erratum: 195 (1982) 639
- (1981) Nucl. Instrum. Meth. , vol.182-183 , pp. 25
- Sigmund, P.¹ Gras-Marti, A.²

47
- 21544431995
- (1987) J. Appl. Phys. , vol.62 , pp. 1800
- Windischmann, H.¹

48
- 0004048162
- North-Holland, Amsterdam
- (1983) Radiation Effects Computer Experiments
- Beeler Jr., J.R.¹

49
- 0003958099
- INSPEC, London
- (1989) Properties of Amorphous Silicon, second ed.
- Fritzsche, H.¹

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