Damage production in a-Si under low-energy self-atom bombardment

Journal of Applied Physics

Volumn 90, Issue 2, 2001, Pages 689-695

  Koster, Monika ^a   Urbassek, Herbert M ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035878710     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1380408     Document Type: Article

References (35)

1. Thin Film and Depth Profile Analysis, edited by H. Oechsner (Springer, Berlin, 1984).
2. Beam Modification of Materials, edited by T. Itoh (Elsevier, Amsterdam, 1989), Vol. 3.
3. M. Nastasi, J. W. Mayer, and J. K. Hirvonen, Ion-solid Interactions: Fundamentals and Applications (Cambridge University, Cambridge, England, 1996).
4. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989).
5. K.-H. Müller, J. Appl. Phys. 62, 1796 (1987).
6. S. Mantl, B. Holländer, W. Jäger, B. Kabius, H. J. Jorke, and E. Kasper, Nucl. Instrum. Methods Phys. Res. B 39, 405 (1989).
7. G. Bai and M.-A. Nicolet, J. Appl. Phys. 71, 4228 (1992).
8. C. Kim, I. K. Robinson, T. Spila, and J. E. Greene, J. Appl. Phys. 83, 7608 (1998).
9. M. Kitabatake and J. E. Greene, Thin Solid Films 272, 271 (1996).
10. B. Strickland and C. Roland, Phys. Rev. B 51, 5061 (1995).
11. M. V. Ramana Murty and H. A. Atwater, Phys. Rev. B 45, 1507 (1992).
12. K. Kyuno, D. G. Cahill, R. S. Averback, J. Tarus, and K. Nordlund, Phys. Rev. Lett. 83, 4788 (1999).
13. H. Hensel and H. M. Urbassek, Phys. Rev. B 57, 4756 (1998).
14. K. Nordlund and R. S. Averback, Appl. Phys. Lett. 70, 3103 (1997).
15. J. E. Rubio, L. A. Marqués, M. Jaraíz, L. A. Bailón, and J. Barbolla, Nucl. Instrum. Methods Phys. Res. B 102, 301 (1995).
16. J. E. Rubio, L. A. Marqués, L. Pelaz, M. Jaraíz, and J. Barbolla. Nucl. Instrum. Methods Phys. Res. B 112, 156 (1996).
17. J. Tarus, K. Nordlund, and J. Sillanpää, Nucl. Instrum. Methods Phys. Res. B 153, 378 (1999).
18. R. R. Djordjevic, M. F. Thorpe, and F. Wooten, Phys. Rev. B 52, 5685 (1995).
19. J. Dong and D. A. Drabold, Phys. Rev. Lett. 80, 1928 (1998).
20. F. Wooten and D. Weaire, Solid State Phys. 40, 1 (1987).
21. P. N. Keating, Phys. Rev. 145, 637 (1966).
22. M. Koster and H. M. Urbassek, Phys. Rev. B 62, 11219 (2000).
23. J. Tersoff, Phys. Rev. B 38, 9902 (1988), parameter set C.
24. K. M. Beardmore and N. Grønbech-Jensen, Phys. Rev. B 60, 12610 (1999).
25. J. F. Ziegler, J. P. Biersack, and U. Littmark, in Stopping Powers and Ranges of Ions in Matter, edited by J. F. Ziegler (Pergamon, New York, 1985), Vol. 1.
26. G. H. Gilmer and C. Roland, Appl. Phys. Lett. 65, 824 (1994).
27. H. Hensel and H. M. Urbassek, Phys. Rev. B 58, 2050 (1998).
28. J. Tarus, K. Nordlund, A. Kuronen, and J. Keinonen, Phys. Rev. B 58, 9907 (1998).
29. R. Pinzón and H. M. Urbassek, Phys. Rev. B 63, 195319 (2001).
30. L. A. Miller, D. K. Brice, A. K. Prinja, and S. T. Picraux, Phys. Rev. B 49, 16953 (1994).
31. W. Windl, T. J. Lenosky, J. D. Kress, and A. F. Voter, Nucl. Instrum. Methods Phys. Res. B 141, 61 (1998).
32. M. J. Caturla, T. Diaz de la Rubia, and G. H. Gilmer, J. Appl. Phys. 77, 3121 (1995).
33. T. Diaz de la Rubia and G. H. Gilmer, Phys. Rev. Lett. 74, 2507 (1995).
34. H. Hensel and H. M. Urbassek, Nucl. Instrum. Methods Phys. Res. B 142, 287 (1998).
35. G. Carter, J. Phys. D 27, 1046 (1994).