Plasma immersion ion implantation using titanium and oxygen ions

Surface and Coatings Technology

Volumn 128-129, Issue 1, 2000, Pages 116-120

  Thorwarth, G ^a   Mandl S ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Arc evaporation; Plasma immersion ion implantation; REM; Rutherford backscattering spectroscopy; Titanium oxide

Indexed keywords

CATHODES; EVAPORATION; INTERFACES (MATERIALS); MIXING; OXYGEN; PLASMA APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TITANIUM;

PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 0033707302     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00586-7     Document Type: Article

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