High-resolution microgyroscope using vibratory motion adjustment technology

Sensors and Actuators, A: Physical

Volumn 90, Issue 1-2, 2001, Pages 153-159

  Kawai, Hiroshi ^a   Atsuchi, Ken Ichi ^a   Tamura, Masaya ^a   Ohwada, Kuniki ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

CAD simulation; Gyroscope; Mechanical coupling; Resolution; Vibratory motion

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; ELECTROSTATICS; FORCE MEASUREMENT; NOISE ABATEMENT; SENSORS; VIBRATORS;

MECHANICAL COUPLING; VIBRATORY MICROGYROSCOPES;

GYROSCOPES;

EID: 0035341293     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00460-5     Document Type: Article

References (6)

1. Direct measurement of mechanical coupling in microgyroscope using a two-dimensional laser displacement meter
2. A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes
3. Wafer level vacuum packaged de-coupled vertical gyroscope by a new fabrication process
4. The silicon angular rate sensor system MARS-RR
5. Micromechanical LIGA-Gyroscope
6. AutoMM: Automatic generation of dynamic macromodels for MEMS devices