Optimisation methodology for low-g microaccelerometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4230, Issue , 2000, Pages 128-139

  Tay, F E H ^a   Jun, X ^a   Logeeswaran, V J ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electrostatic spring constant; Microaccelerometer; Modelling; Ratiometricity; Spreadsheet optimisation

Indexed keywords

EID: 0034452595     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.404894     Document Type: Conference Paper

References (8)

1. Parametrised layout synthesis, extraction and SPICE simulation for MEMS
2. Maximising microelectromechanical sensor and actuator sensitivity by optimizing geometry
3. Optimal shape design of an electrostatic comb drive in MEMS
4. A SCREAM micromachined high aspect ratio low-g microaccelerometer
5. An all-silicon single-wafer fabrication technology for precision microaccelerometers