Optimised layout generator for microgyroscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4230, Issue , 2000, Pages 119-127

  Tay, F E H ^a   Shifeng, L ^a   Logeeswaran, V J ^a   Ng, D C K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Layout Generator; Microgyroscope; Optimisation; Synthesis

Indexed keywords

ALGORITHMS; ANALOG TO DIGITAL CONVERSION; COMPUTER AIDED DESIGN; DEGREES OF FREEDOM (MECHANICS); FINITE ELEMENT METHOD; GYROSCOPES; MICROSENSORS; OPTIMIZATION;

GENERALISED REDUCED GRADIENT (GRG); MICROGYROSCOPES; OPTIMISED LAYOUT;

MICROELECTROMECHANICAL DEVICES;

EID: 0034453442     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.404893     Document Type: Conference Paper

References (8)

1. CAD tools and foundries to boost microsystems development
2. Structured design of integrated MEMS
3. Maximising microelectromechanical sensor and actuator sensitivity by optimizing geometry
4. Automated optimal synthesis of micro-accelerometer
5. Multi-mode sensitive layout synthesis of micro-resonators
6. Optimization-based synthesis of micro-resonators