Optimal design of a tuning fork gyroscope and its testing experiment

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 621-623

  Dong, Yan ^a   Tay, Friancis E H ^b   Wen, Yu ^b   Yuan, Xu ^a   Chen, William T ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Eigenfrequency; Gyroscope; Optimization; Testing

Indexed keywords

DEFLECTION CURVES; EIGENFREQUENCY; OPTIMAL DESIGNS; RAYLEIGH PRINCIPLES;

EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; FUNCTIONS; GYROSCOPES; INTEGRAL EQUATIONS; MATERIALS SCIENCE; NATURAL FREQUENCIES; OPTIMIZATION; POTENTIAL ENERGY; RAYLEIGH SCATTERING; SILICON ON INSULATOR TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0011525512     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Yan Dong, A. Q. Liu, A high accuracy design for the resonant sensor, Eurosensors XII, Southampton England, September., 1998
2. 1, Xu Yuan, William T. Chen, Optimization Design of MEMS Gyroscope, Eurosensors XIII, The Hague, The Netherlands, September, 1999