High-speed porous thin film humidity sensors

Electrochemical and Solid-State Letters

Volumn 5, Issue 11, 2002, Pages

  Harris, K D ^a   Huizinga, A ^a   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATMOSPHERIC HUMIDITY; DEPOSITION; ELECTRODES; MICROSTRUCTURE; MOISTURE; POLYMERS; POROUS MATERIALS; SILICA; THIN FILMS;

GLANCING ANGLE DEPOSITION; HIGH SPEED POROUS THIN FILM HUMIDITY SENSORS; POLYMER MATRIX; THIN FILM MICROSTRUCTURES;

CHEMICAL SENSORS;

EID: 0036846192     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1512141     Document Type: Article

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