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Electrochemical and Solid-State Letters

Volumn 4, Issue 6, 2001, Pages

Fabrication of perforated thin films with helical and chevron pore shapes

(3) Harris, K D a Westra, K L a Brett, M J a

a UNIVERSITY OF ALBERTA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; FILM PREPARATION; PHOTOLITHOGRAPHY; PHOTORESISTS; POROSITY; SPIN GLASS; THICKNESS MEASUREMENT;

CHEMICAL ETCHING; CHEVRON PORE SHAPES; GLANCING ANGLE DEPOSITION AND TEMPLATING TECHNIQUES; PERFORATED THIN FILMS;

THIN FILMS;

EID: 0035383703 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1371255 Document Type: Article

Times cited : (43)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.