Sensing humidity using nanostructured SiO posts: Mechanism and optimization

Sensors and Materials

Volumn 13, Issue 7, 2001, Pages 399-431

  Wu, Andy T ^a   Brett, Michael J ^b  

^a THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY   (United States)

^b UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Glancing angle deposition; Humidity sensor; New sensing material; New sensing model; New sensor fabrication technique; Sensor; SiO film

Indexed keywords

EID: 0035648616     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (29)

1. K. Robbie and M. J. Brett: J. Vac. Sci. Technol. A 15 (1997) 1460, United States patent 5866204.
2. A. T. Wu, M. J. Brett, A. Huizinga and M. Seto: Proceedings of the 1999 IEEE Canadian Conference on Electrical and Computer Engineering (1999) p. 1662.
3. A. T. Wu, M. Seto and M. J. Brett: Sensors and Materials 11 (1999) 493.
4. R. K. Nahar, V. K. Khanna and W. S. Khokle: J. Phys. D: Appl. Phys. 17 (1984) 2087.
5. Y. Shimizu, H. Arai and T. Seiyama: Sensors and Actuators 7 (1985) 11.
6. G. Q. Li, P. T. Lai, M. Q. Huang. S. H. Zeng, B. Li, and Y. C. Cheng: J. App. Phys. 87 (2000) 8716.
7. V. K. Khanna and R. K. Nahar: Sensors and Actuators 5 (1984) 187.
8. R. W. Sillars: J. Inst. Elec. Eng. 8 (1937) 378.
9. K. Robbie, J. C. Sit and M. J. Brett: J. Vac. Sci. Technol. B 16 (1998) 1155.
10. D. H. Everett, The structure and properties of porous materials, D. H. Everett and F. S. Stone (Eds.), Butterworths Scientific Publications, London, (1958) p. 96.
11. S. Brunauer, L. E. Copeland and D. L. Kantro: The solid-gas interface, Vol.1, E. A. Flood (Ed.), Marcel Dekker Inc., New York, (1967) p. 96.
12. N. K. Nair and J. M. Thorp: Trans. Faraday Soc. 61 (1965) p. 962.
13. th edition, (R.C. Weast (Ed.) Chemical Rubber Co., Ohio (1975/1976) p. B-137.
14. Handbook of Thin Film Technology, eds. Maissel and Glang (McGraw-Hill, New York, 1970) p. 19-9.
15. Handbook of Optical Constants of Solids (Academic Press Inc., 1985) p. 765.
16. M. J. Madou and S. R. Morrison: Chemical sensing with solid state devices (Academic Press, Inc., San Diego, 1989) p. 150.
17. R. K. Iler: The chemistry of silica (John Wiley & Sons, Inc. USA & Canada, 1979) p. 4.
18. S. Brunauer, P. H. Emmett and E. Teller: J. Amer. Chem. Soc. 60 (1938) 309.
19. S. Brunauer, L. S. Deming, W. E. Deming and E. Teller: J. Amer. Chem. Soc. 62 (1940) 1723.
20. B. M. Kulwicki: J. Am. Ceram. Soc. 74 (1991) 697.
21. W. J. Fleming: Proceedings of the international automotive meeting (Detroit, USA, 1981) p. 51.
22. N. Yamazoe and Y. Shimizu: Sensors and Actuators 10 (1986) 379.
23. C. H. S. Dupuy and A. Cachard: Physics of nonmetallic thin films (Plenum Press, New York, 1976) p. 225.
24. J. Roger and C. H. S. Dupuy: J. Appl. Phys. 46 (1975) 3102.
25. J. J. O'Dwyer: The theory of electrical conduction and breakdown in solid dielectrics (Claredon Press, Oxford, 1973) p. 194.
26. J. G. Fagan and V. R. W. Amarakoon: Am. Ceram. Soc. Bull. 72 (1993) 119.
27. J. C. Sit, D. Vick, K. Robbie and M. J. Brett: J. Mater. Res. 14 (1999) 1197.
28. D. Vick, Y. Y. Tsui, M. J. Brett and R. Fedosejevs: Thin Solid Films 350 (1999) 49.
29. J. H. de Boer: The structure and properties of porous materials, eds. D. H. Everett and F. S. Stone (Butterworths Scientific Publications, London, 1958) p. 68.