Capacitive SiO humidity sensors with novel microstructures

Sensors and Materials

Volumn 11, Issue 8, 1999, Pages 493-505

  Wu, Andy T ^a   Seto, Mary ^a   Brett, Michael J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Glancing angle deposition; Humidity sensor; New sensing material; New sensor fabrication technique; Sensor; SiO film

Indexed keywords

EID: 0033482495     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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