The estimation of sputtering yields for SiC and Si

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 196, Issue 1-2, 2002, Pages 39-50

  Ecke, Gernot ^a   Kosiba, Rastislav ^a,b   Kharlamov, Vladimir ^c   Trushin, Yuri ^c   Pezoldt, Jörg ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^c IOFFE INSTITUTE   (Russian Federation)

Author keywords

Ion solid interactions; Monte Carlo simulation; Sputtering; Sputtering yield

Indexed keywords

AUGERS; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; ION BEAMS; MONTE CARLO METHODS; SPUTTERING;

ION SOLID INTERACTIONS;

SILICON CARBIDE;

EID: 0036842074     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01273-9     Document Type: Article

References (41)

1. Pezoldt J., Stauden T., Cimalla V., Ecke G., Romanus H., Eichhorn G. Materials Science Forum. 264-268:1998;251.
2. Ber B.J., Kharlamov V.S., Kundrjavtsev Yu.A., Merkulov A.V., Trushin Yu.V., Zhurkin E.E. Nucl. Instr. and Meth. B. 127/128:1997;286.
3. Biersack J.P., Eckstein W. Appl. Phys. A. 34:1984;73.
4. Biersack J.P., Berg S., Nender C. Nucl. Instr. and Meth. B. 59/60:1991;21.
5. The SRIM-2000 package is available on http://www.SRIM.org/.
6. Biersack J.P. Nucl. Instr. and Meth. B. 153:1999;398.
7. Plank H., Eckstein W. Nucl. Instr. and Meth. B. 124:1997;23.
8. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Solid. 1985;Pergamon Press, New York.
9. Kosiba R., Ecke G. Nucl. Instr. and Meth. B. 187:2002;36.
10. Smith R. Atomic and Ion Collisions in Solids and at Surfaces. 1997;230 Cambridge University Press, Cambridge.
11. Malherbe J.B. Crit. Rev. Solid State Mater. Sci. 19:1994;55.
12. Gades H., Urbassek H.M. Nucl. Instr. and Meth. B. 88:1994;218.
13. Shulga V.I. Nucl. Instr. and Meth. B. 187:2002;178.
14. Heera V., Skorupa W. Mater. Res. Soc. Symp. Proc. 438:1997;241.
15. Blank P., Wittmaack K. J. Appl. Phys. 50:1979;1519.
16. Kirschner J., Etzkorn H.W. Appl. Surf. Sci. 3:1979;251.
17. Sielanko J., Sowa M. Nucl. Instr. and Meth. 209/210:1983;483.
18. Marqués L.A., Rubio J.E., Jaraíz M., Bailón L.A., Barbolla J.J. J. Appl. Phys. 81:1997;1488.
19. Beck H.L., Lee M.-H., Ohuchi F.S. Mat. Res. Soc. Symp. Proc. 438:1997;253.
20. Pezoldt J., Stottko B., Kupris G., Ecke G. Mat. Sci. Eng. B. 29:1995;94.
21. Oswald S., Wirth H. Surf. Interface Anal. 27:1999;136.
22. Bellina J.J., Ferrante J., Zeller M.V. J. Vac. Sci. Technol A. 4:1986;1692.
23. Miotello A., Calliari L., Kelly R., Laidani N., Bonelli M., Guzman L. Nucl. Instr. and Meth. B. 80/81:1993;931.
24. Muehlhoff L., Choyke W.J., Bozack M.J., Yates J.T. J. Appl. Phys. 60:1986;2842.
25. Lee W.-Y. J. Appl. Phys. 51:1980;3365.
26. Kang S.T., Shimizu R., Okutani T. Jpn. J. Appl. Phys. 18:1979;1717.
27. Zalm P.C. J. Appl. Phys. 54:1983;2660.
28. Andersen H.H., Bay H.L. J. Appl. Phys. 46:1975;1919.
29. Sigmund P. Phys. Rev. 184:1969;383.
30. Fröhlich O., Baumann H., Bethge K. Nucl. Instr. and Meth. B. 50:1996;77.
31. Xu X., Della Ratta A.D., Sosonkina J., Melgailis J. J. Vac. Sci. Technol. B. 10:1992;2675.
32. Bachurin V.I., Lepshin P.A., Smirnov V.K. Vacuum. 56:2000;241.
33. W. Eckstein, C. García-Rosales, J. Roth, W. Ottenberger, Sputtering Data, Max-Planck-Institut für Plasmaphysik, Report IPP 9/82 (1993).
34. Menzel R., Bachmann T., Machalett F., Wesch W., Lang U., Wendt M., Musil C., Mühle R. Appl. Surf. Sci. 136:1998;1.
35. Bischoff L., Teichert J., Heera V. Appl. Surf. Sci. 184:2001;372.
36. Schneider P., Bischoff L., Teichert J., Heese E. Nucl. Instr. and Meth. B. 117:1996;77.
37. Comas J., Cooper C.B. J. Appl. Phys. 37:1966;2820.
38. Hechtl E., Bohdansky J., Roth J. J. Nucl. Mater. 103&104:1981;333.
39. Mohri M., Watanabe K., Yamashina T., Doi H., Hayakava K. J. Nucl. Mater. 75:1978;309.
40. García-Rosales C., Eckstein W., Roth J. J. Nucl. Mat. 218:1994;8.
41. Eckstein W., García-Rosales C., Roth J., László J. Nucl. Instr. and Meth. B. 83:1993;95.