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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 187, Issue 2, 2002, Pages 178-188

Density effects in sputtering at normal and oblique ion bombardment

(1) Shulga, V I a

a MOSCOW STATE UNIVERSITY (Russian Federation)

Author keywords

Angular and energy distributions; Computer simulation; Density effects; Sputtering; Sputtering yield

Indexed keywords

COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); SEMICONDUCTING GERMANIUM; SPUTTERING; SURFACE PHENOMENA; TARGETS;

DENSITY EFFECTS; ENERGY DISTRIBUTIONS;

ION BOMBARDMENT;

EID: 0036467184 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00932-6 Document Type: Article

Times cited : (7)

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