Angular dependences of surface composition, sputtering and ripple formation on silicon under N2+ ion bombardment

Vacuum

Volumn 56, Issue 4, 2000, Pages 241-245

  Bachurin, V I ^a   Lepshin, P A ^a   Smirnov, V K ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001257488     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(99)00194-3     Document Type: Article

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