Effects of capacitors, resistors and residual charge on the static and dynamic performance of electrostatically-actuated devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 120-130

  Chan, E K ^a   Dutton, R W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; COMPUTER SIMULATION; DAMPING; ELECTRIC CHARGE; ELECTRODES; ELECTROSTATIC DEVICES; MATHEMATICAL MODELS; MICROACTUATORS; RESISTORS;

ELECTROSTATIC ACTUATORS; ELECTROSTATIC POSITIONERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032687006     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)