Development of a microelectromechanical system pressure sensor for rehabilitation engineering applications

International Journal of Electronics

Volumn 87, Issue 6, 2000, Pages 757-767

  Ho, Jyh Jier ^b   Fang, Y K ^a   Hsieh, M C ^a   Ting, S F ^a   Chen, G S ^a   Ju, M S ^a   Chen, Terry Y ^a   Huang, C R ^a   Chen, C Y ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b FORTUNE INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTOLITHOGRAPHY; SENSORS; SILICON WAFERS; STRAIN;

MICROPRESSURE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 18744402468     PISSN: 00207217     EISSN: None     Source Type: Journal    
DOI: 10.1080/002072100131940     Document Type: Article

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