Progress and preliminary results on EB stepper

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 6 B, 2002, Pages 4136-4140

  Kawata, Shintaro ^a   Hamashima, Muneki ^a   Miura, Takaharu ^a   Suzuki, Kazuaki ^a   Okamoto, Kazuya ^a   Yamaguchi, Takeshi ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Air guide; Electron beam (EB); Electron beam projection lithography (EPL); Electron optics; Linear motor; Reticle

Indexed keywords

ELECTRON BEAMS; ELECTRON OPTICS; LINEAR MOTORS; SCANNING;

ELECTRON BEAM PROJECTION LITHOGRAPHY (EPL);

ELECTRON BEAM LITHOGRAPHY;

EID: 0036614693     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4136     Document Type: Article

References (14)