Boundary structure of Mo/Si multilayers for soft X-ray mirrors

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 5 A, 2002, Pages 3052-3056

  Ishino, Masahiko ^a,b   Yoda, Osamu ^a,b   Haishi, Yasuyuki ^a,b   Arimoto, Fumiko ^a,b   Takeda, Mitsuhiro ^a,b   Watanabe, Seiichi ^a,b   Ohnuki, Somei ^a,b   Abe, Hiroaki ^a,b  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Mixed layer; Mo(110) crystallite size; Mo Si multilayer

Indexed keywords

COMPOSITION; CRYSTAL ORIENTATION; INTERFACES (MATERIALS); MIRRORS; OPTICAL MATERIALS; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY SCATTERING;

SOFT X-RAY MIRRORS;

MULTILAYERS;

EID: 0036578062     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.3052     Document Type: Article

References (18)