Fabrication of semitransparent multilayer polarizer and its application to soft X-ray ellipsometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3764, Issue , 1999, Pages 13-27

  Haga, Tsuneyuki ^a   Tinene, Marcia C K ^a   Ozawa, Akira ^a   Utsumi, Yuichi ^a   Itabashi, Seiichi ^a   Ohkubo, Takashi ^a   Shimada, Masaru ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; LIGHT POLARIZATION; LIGHT REFLECTION; MIRRORS; OPTICAL BEAM SPLITTERS; OPTICAL MULTILAYERS; SURFACE ROUGHNESS;

MULTILAYER POLARIZER; SOFT X RAY ELLIPSOMETER;

OPTICAL INSTRUMENTS;

EID: 0033364751     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (29)