Buried interfaces in Mo/Si multilayers studied by soft-X-ray emission spectroscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 11, 1999, Pages 6476-6478

  Miyata, Noboni ^a   Ishikawa, Sadayuki ^a   Yanagihara, Mihiro ^a   Watanabe, Makoto ^a  

^a Research Inslimre fur Scientific Measurements   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; METALLIC FILMS; MOLYBDENUM; MULTILAYERS; NONDESTRUCTIVE EXAMINATION; SILICON; SPECTRUM ANALYSIS; SYNCHROTRON RADIATION; X RAY SPECTROSCOPY;

SOFT X RAY EMISSION SPECTROSCOPY (SXES);

INTERFACES (MATERIALS);

EID: 0033330245     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6476     Document Type: Article

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