Progress in development of 3-aspherical mirror optics for EUVL

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3767, Issue , 1999, Pages 164-171

  Kinoshita, H ^a   Watanabe, T ^a   Bajuk, D ^a   Daniel, J ^a   Kimpara, Y ^a   Kriese, M ^a   Platonov, Y ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPHERICS; INTERFEROMETERS; LIGHT REFLECTION; MIRRORS; MOLYBDENUM; OPTICAL FILMS; OPTICAL MULTILAYERS; PHASE SHIFT; SILICON; ULTRAVIOLET RADIATION;

ASPHERICAL MIRROR OPTICS; COMPUTER CONTROLLED OPTICAL SURFACING (CCOS); EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0033361510     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)