Zero-order-free, multilayer-coated laminar grating in the 31 nm region

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 4 PART A, 1998, Pages 2066-2067

  Toyoda, Mitsunori ^a   Miyata, Noboru ^a   Yanagihara, Mihiro ^a   Watanabe, Makoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Grating; Grating efficiency; Laminar grating; Multilayer; Normal incidence; Soft X ray

Indexed keywords

HOLOGRAPHY; LIGHT INTERFERENCE; METALLIC SUPERLATTICES; MOLYBDENUM; SILICON;

GRATING EFFICIENCY; LAMINAR HOLOGRAPHIC GRATING;

DIFFRACTION GRATINGS;

EID: 0032050403     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.2066     Document Type: Article

References (1)

1. M. P. Kowalski, R. G. Cruddace, J. F. Seely, J. C. Rife, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke and W. R. Hunter: Opt. Lett. 22 (1997) 834.