Evaluation of comb-drive nickel micromirror for fiber optical communication

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 66-71

  Akimoto, Koji ^a   Uenishi, Yuji ^a   Honma, Kazuharu ^a   Nagaoka, Shinji ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROPLATING; ELECTROSTATIC DEVICES; ETALONS; FIBER OPTICS; FREQUENCY RESPONSE; LIGHT REFLECTION; MICROMACHINING; NICKEL; OPTICAL COMMUNICATION; PHOTORESISTS; VOLTAGE MEASUREMENT;

NICKEL MICROMIRRORS; NICKEL SURFACE MICROMACHINING;

MIRRORS;

EID: 0030686679     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)