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Volumn , Issue , 1994, Pages 164-169
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RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COERCIVE FORCE;
COMPOSITE MATERIALS;
COMPOSITION;
FLOW MEASUREMENT;
LEAD COMPOUNDS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC MATERIALS;
PIEZOELECTRICITY;
POLARIZATION;
SPUTTERING;
THIN FILMS;
COERCIVE FIELD;
COMPOSITE TARGET;
MORPHOTROPIC COMPOSITION;
PIEZOELECTRIC ACTUATORS;
PIEZOELECTRIC LEAD ZIRCONATE TITANATE;
RADIO FREQUENCY MAGNETRON SPUTTERING;
RELATIVE DIELECTRIC CONSTANT;
REMNANT POLARIZATION;
ACTUATORS;
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EID: 0027927614
PISSN: None
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (25)
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References (23)
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