Precise control of CVD-ZrO2 film properties based on kinetic information

Materials Research Society Symposium - Proceedings

Volumn 697, Issue , 2002, Pages 195-200

  Kawamoto, Takashi ^a   Shimogaki, Yukihiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; DEPOSITION; DIELECTRIC FILMS; DIFFUSION; ELECTRIC INSULATORS; FILM GROWTH; IMPURITIES; REACTION KINETICS; SUBSTRATES; THERMODYNAMIC STABILITY; ZIRCONIA;

AMORPHOUS STATE;

THIN FILMS;

EID: 0036448437     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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