Silicon flow sensor for gases and liquids using AC measurements

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 124-132

  Bedö, Gerlinde ^a   Fannasch, Heike ^a   Müller, Rudolf ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT CONVECTION; SILICON SENSORS; THERMAL INSULATION; THIN FILMS; VELOCITY MEASUREMENT;

PLATINUM THIN FILMS; THERMAL FLOW SENSORS;

CHEMICAL SENSORS;

EID: 0034249958     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00380-0     Document Type: Article

References (11)

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