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Volumn 38, Issue 7 B, 1999, Pages 4147-4151
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Pt/Ti thin film adhesion on SiNx/Si substrates
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Author keywords
Adhesion; Bottom electrode; Peel test; Pt Ti; Scratch test
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Indexed keywords
ANNEALING;
MAGNETRON SPUTTERING;
METALLIC FILMS;
PEELING;
PLATINUM;
SILICON;
SILICON NITRIDE;
SUBSTRATES;
THIN FILMS;
TITANIUM;
TITANIUM DIOXIDE;
ADHESIVE TAPE TEST;
PEEL TEST;
SCRATCH TEST;
ADHESION;
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EID: 0033322943
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.4147 Document Type: Article |
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Times cited : (14)
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References (4)
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