Observation of critical gate oxide thickness for substrate-defect related oxide failure

Applied Physics Letters

Volumn 75, Issue 9, 1999, Pages 1255-1257

  Bearda, Twan ^a   Houssa, Michel ^a   Mertens, Paul W ^a   Vanhellemont, Jan ^a,b   Heyns, Marc ^a  

^a IMEC   (Belgium)

^b SILTRONIC AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005947223     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124659     Document Type: Article

References (7)

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