Voltage-dependent voltage-acceleration of oxide breakdown for ultra-thin oxides

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 541-544

  Wu, E Y ^a   Aitken, J ^a   Nowak, E ^a   Vayshenker, A ^a   Varekamp, P ^a   Hueckel, G ^a   McKenna, J ^a   Harmon, D ^a   Han, L K ^a   Montrose, C ^a   Dufresne, R ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL;

OXIDE BREAKDOWN; ULTRA-THIN OXIDES;

OXIDES;

EID: 17344378427     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)