Microscope projection photolithography for rapid prototyping of masters with micron-scale features for use in soft lithography

Langmuir

Volumn 17, Issue 19, 2001, Pages 6005-6012

  Love, J Christopher ^a   Wolfe, Daniel B ^a   Jacobs, Heiko O ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SOFT LITHOGRAPHY;

MASKS; MICROSCOPES; MICROSTRUCTURE; PROJECTION SYSTEMS; RAPID PROTOTYPING; SUBSTRATES; TRANSPARENCY;

PHOTORESISTS;

EID: 0035909171     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la010655t     Document Type: Article

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