SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 179, Issue 1-4, 2001, Pages 213-221

Auger depth profile analysis and EFTEM analysis of annealed Ti/Al-contacts on Si-doped GaN

(6) Pidun, Markus a Karduck, Peter a Mayer, Joachim a Heime, Klaus a Schineller, Bernd a Walther, Thomas b

a RWTH AACHEN UNIVERSITY (Germany)

b UNIVERSITY OF BONN (Germany)

Author keywords

Auger; EFTEM; GaN; Metallization layer; Ohmic contacts

Indexed keywords

ANNEALING; ENERGY DISPERSIVE SPECTROSCOPY; GALLIUM NITRIDE; INTERDIFFUSION (SOLIDS); INTERMETALLICS; METALLIZING; MICROSTRUCTURE; OHMIC CONTACTS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; TITANIUM ALLOYS; TRANSMISSION ELECTRON MICROSCOPY;

AUGER DEPTH PROFILE ANALYSIS; ELECTRON SPECTROSCOPIC IMAGING;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0035898803 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00282-3 Document Type: Article

Times cited : (6)

References (34)

1
- 21544457842
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1003
- Lin, M.E.¹ Ma, Z.² Huang, F.Y.³ Fan, Z.F.⁴ Allen, L.H.⁵ Morkoç, H.⁶

2
- 3442882603
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1672
- Fan, Z.¹ Mohammad, S.N.² Kim, W.³ Aktas, Ö.⁴ Botchkarev, A.E.⁵ Morkoç, H.⁶

3
- 0004690552
- (1996) Appl. Phys. Lett. , vol.69 , pp. 273
- Lester, L.F.¹ Brown, J.M.² Ramer, J.C.³ Zhang, L.⁴ Hersee, S.D.⁵ Zolper, J.C.⁶

4
- 0000713059
- (1998) J. Electron. Mater. , vol.27 , pp. 829
- Lee, H.J.¹ Yu, S.J.² Asahi, H.³ Gonda, S.-I.⁴ Kim, Y.H.⁵ Rhee, J.K.⁶ Noh, S.J.⁷

5
- 0033175436
- (1999) Solid State Electron. , vol.43 , pp. 1483
- Koyama, Y.¹ Hashizume, T.² Hasegawa, H.³

6
- 0034156227
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 729
- Sheu, J.K.¹ Su, Y.K.² Chi, G.C.³ Jou, M.J.⁴ Liu, C.C.⁵ Chang, C.M.⁶ Hung, W.C.⁷ Bow, J.S.⁸ Yu, Y.C.⁹

7
- 0034227948
- (2000) Semicond. Sci. Technol. , vol.15 , pp. 756
- Kwak, J.S.¹ Mohney, S.E.² Lin, J.-Y.³ Kern, R.S.⁴

8
- 5644259934
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1556
- Ruvimov, S.¹ Liliental-Weber, Z.² Washburn, J.³ Duxstad, K.J.⁴ Haller, E.E.⁵ Fan, Z.-F.⁶ Mohammad, S.N.⁷ Kim, W.⁸ Botchkarev, A.E.⁹ Morkoc, H.¹⁰

9
- 0000441989
- (1996) J. Electron. Mater. , vol.25 , pp. 811
- Mohney, S.E.¹ Lin, X.²

10
- 0001246774
- (1997) Appl. Phys. Lett. , vol.70 , pp. 57
- Luther, B.P.¹ Mohney, S.E.² Jackson, T.N.³ Asif Khan, M.⁴ Chen, Q.⁵ Yang, J.W.⁶

11
- 0001246773
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3859
- Luther, B.P.¹ DeLucca, J.M.² Mohney, S.E.³ Karlicek R.F., Jr.⁴

12
- 0001230666
- (1998) J. Electron. Mater. , vol.27 , pp. 196
- Luther, B.P.¹ Mohney, S.E.² DeLucca, J.M.³ Karlicek R.F., Jr.⁴

13
- 0031548276
- (1997) Appl. Surf. Sci. , vol.117-118 , pp. 362
- Holloway, P.H.¹ Kim, T.-J.² Trexler, J.T.³ Miller, S.⁴ Fijol, J.J.⁵ Lampert, W.V.⁶ Haas, T.W.⁷

14
- 0033221928
- (1999) Phys. Stat. Solidi A , vol.176 , pp. 767
- Ruterana, P.¹ Nouet, G.² Kehagias, T.³ Komninou, P.⁴ Karakostas, T.⁵ Di Forte Poisson, M.A.⁶ Huet, F.⁷ Morkoc, H.⁸

15
- 0033750657
- (2000) J. Electron. Mater. , vol.29 , pp. 603
- Boudart, B.¹ Trassaert, S.² Wallart, X.³ Pesant, J.C.⁴ Yaradou, O.⁵ Theron, D.⁶ Crosnier, Y.⁷ Lahreche, H.⁸ Omnes, F.⁹

16
- 0033685888
- (2000) Semicond. Sci. Technol. , vol.15 , pp. 585
- Tan, L.S.¹ Prakash, S.² Ng, K.M.³ Ramam, A.⁴ Chua, S.J.⁵ Wee, A.T.S.⁶ Lim, S.L.⁷

17
- 0034225984
- (2000) Appl. Surf. Sci. , vol.161 , pp. 263
- Pal, S.¹ Sugino, T.²

18
- 0004716699
- Characterisation of Ohmic contacts to n-GaN using transmission electron microscopy
- (1999) Inst. Phys. Conf. Ser. , vol.161
- Bright, A.N.¹ Tricker, D.M.² Davies, R.³ Beanland, R.⁴ Thomas, P.J.⁵ Lloyd, S.J.⁶ Midgley, P.A.⁷ Humphreys, C.⁸

19
- 0003521687
- Springer, Berlin
- (1995) Energy-Filtering Transmission Electron Microscopy
- Reimer, L.¹

20
- 0032967704
- (1999) Ultramicroscopy , vol.78 , pp. 207
- Plitzko, J.M.¹ Mayer, J.²

21
- 0000465525
- (1998) Mikrochim. Acta (Suppl.) , vol.15 , pp. 109
- Karduck, P.¹

22
- 0004091959
- Wiley, New York
- (1991) Factor Analysis in Chemistry, 2nd Edition
- Malinowski, E.R.¹

23
- 0027682162
- (1993) Prakt. Metallogr. , vol.30 , pp. 482
- Strecker, A.¹ Salzberger, U.² Mayer, J.³

24
- 0041896210
- (1993) Appl. Surf. Sci. , vol.70-71 , pp. 9
- Hofmann, S.¹

25
- 0021377550
- (1985) Thin Solid Films , vol.124 , pp. 223
- Zalar, A.¹

26
- 0022749363
- (1986) Surf. Interface Anal. , vol.9 , pp. 41
- Zalar, A.¹

27
- 0002079828
- (1990) Nucl. Instr. Meth. Phys. Res. B , vol.51 , pp. 34
- Pamler, W.¹ Wangemann, K.² Kampermann, S.³ Hösler, W.⁴

28
- 0026745710
- (1992) Surf. Interface Anal. , vol.18 , pp. 52
- Pamler, W.¹ Wangemann, K.²

29
- 0003795213
- D. Briggs, M.P. Seah (Eds.), Wiley, Chichester
- (1990) Practical Surface Analysis with AES and XPS, 2nd Edition
- Hofmann, S.¹

30
- 0003667033
- Springer, Berlin
- (1984) Thin Film and Depth Profile Analysis, Topics in Current Physics , vol.37
- Oechsner, H.¹

31
- 0031646943
- (1998) Surf. Interface Anal. , vol.26 , pp. 1
- Wöhner, T.¹ Ecke, G.² Rößler, H.³ Hofmann, S.⁴

32
- 0003412161
- Pergamon Press, New York
- (1985) The Stopping and Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

33
- 1542541386
- (1977) Appl. Phys. , vol.13 , pp. 205
- Hofmann, S.¹

34
- 0028494730
- (1994) Surf. Interface Anal. , vol.21 , pp. 673
- Hofmann, S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.