Quantitative thin film analysis by energy filtering transmission electron microscopy

Ultramicroscopy

Volumn 78, Issue 1-4, 1999, Pages 207-219

  Plitzko, J M ^a   Mayer, J ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

EFTEM; Electron spectroscopic imaging; Hollow cone illumination; Inelastic mean free path; Thin film analysis

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; GRAIN BOUNDARIES; IMAGING TECHNIQUES; METALLIC FILMS; SAPPHIRE; SILICON NITRIDE; THIN FILMS; TITANIUM;

ELECTRON SPECTROSCOPIC IMAGING (ESI); ENERGY FILTERING TRANSMISSION ELECTRON MICROSCOPY (EFTEM);

TRANSMISSION ELECTRON MICROSCOPY;

CALCIUM; NITROGEN; SILICON; TITANIUM;

ACCURACY; CONFERENCE PAPER; CRYSTAL; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM; FILTER; ILLUMINATION; IMAGE ANALYSIS; IMAGING; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0032967704     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00021-2     Document Type: Conference Paper

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