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Semiconductor Science and Technology

Volumn 15, Issue 7, 2000, Pages 756-760

Low resistance Al/Ti/n-GaN ohmic contacts with improved surface morphology and thermal stability

(4) Kwak, Joon Seop a Mohney, S E a Lin, Je Yi a Kern, Rs b

a PENNSYLVANIA STATE UNIVERSITY (United States)

b Hewlett Packard Optoelectronics Div (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; HIGH TEMPERATURE PROPERTIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; MULTILAYERS; NITRIDES; OHMIC CONTACTS; SEMICONDUCTING FILMS; THERMODYNAMIC STABILITY;

GALLIUM NITRIDE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0034227948 PISSN: 02681242 EISSN: None Source Type: Journal
DOI: 10.1088/0268-1242/15/7/316 Document Type: Article

Times cited : (69)

References (18)

1
- 21544435375
- Foresi J S and Moustakas T D 1993 Appl. Phys. Lett. 62 2859
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2859
- Foresi, J.S.¹ Moustakas, T.D.²

2
- 21544457842
- Lin M E, Ma Z, Huang F Y, Fan Z F, Allen L H and Morkoç H 1994 Appl. Phys. Lett. 64 1003
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1003
- Lin, M.E.¹ Ma, Z.² Huang, F.Y.³ Fan, Z.F.⁴ Allen, L.H.⁵ Morkoç, H.⁶

3
- 3442882603
- Fan Z F, Mohammad S N, Kim W, Aktas O, Botchkarev A E and Morkoç H 1996 Appl. Phys. Lett. 68 1672
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1672
- Fan, Z.F.¹ Mohammad, S.N.² Kim, W.³ Aktas, O.⁴ Botchkarev, A.E.⁵ Morkoç, H.⁶

4
- 0000356689
- Ping A T, Asif Khan M and Adesida I 1996 J. Electron. Mater. 25 819
- (1996) J. Electron. Mater. , vol.25 , pp. 819
- Ping, A.T.¹ Asif Khan, M.² Adesida, I.³

5
- 0001618585
- Lester L F, Brown J M, Ramer J C, Zhang L and Hersee S D 1996 Appl. Phys. Lett. 69 2737
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2737
- Lester, L.F.¹ Brown, J.M.² Ramer, J.C.³ Zhang, L.⁴ Hersee, S.D.⁵

6
- 0000988383
- Smith L L, Davis R F, Kim M J, Carpenter R W and Huang Y 1996 J. Mater. Res. 11 2257
- (1996) J. Mater. Res. , vol.11 , pp. 2257
- Smith, L.L.¹ Davis, R.F.² Kim, M.J.³ Carpenter, R.W.⁴ Huang, Y.⁵

7
- 0001246774
- Luther B P, Mohney S E, Jackson T N, Khan M A, Chen Q and Yang J W 1997 Appl. Phys. Lett. 70 57
- (1997) Appl. Phys. Lett. , vol.70 , pp. 57
- Luther, B.P.¹ Mohney, S.E.² Jackson, T.N.³ Khan, Ma.⁴ Chen, Q.⁵ Yang, J.W.⁶

8
- 0001230666
- Luther B P, Mohney S E, DeLucca J M and Karlicek R F 1998 J. Electron. Mater. 27 196
- (1998) J. Electron. Mater. , vol.27 , pp. 196
- Luther, B.P.¹ Mohney, S.E.² DeLucca, J.M.³ Karlicek, R.F.⁴

9
- 0032202230
- Luther B P, Mohney S E and Jackson TN 1998 Semicond. Sci Technol. 13 1322
- (1998) Semicond. Sci Technol. , vol.13 , pp. 1322
- Luther, B.P.¹ Mohney, S.E.² Jackson, T.N.³

10
- 0031078188
- Wu Y-F, Jiang W-N, Keller B P, Keller S, Kapolnek D, Denbaars S P, Mishra U K and Wilson B 1997 Solid State Electron. 41 165
- (1997) Solid State Electron. , vol.41 , pp. 165
- Wu, Y.-F.¹ Jiang, W.-N.² Keller, B.P.³ Keller, S.⁴ Kapolnek, D.⁵ Denbaars, S.P.⁶ Mishra, U.K.⁷ Wilson, B.⁸

11
- 0033357633
- Gasser S M, Kolawa E and Nicolet M-A 1999 J. Electron. Mater. 28 949
- (1999) J. Electron. Mater. , vol.28 , pp. 949
- Gasser, S.M.¹ Kolawa, E.² Nicolet, M.-A.³

12
- 0020129227
- Reeves G K and Harrison HB 1982 IEEE Electron Device Lett. 3 111
- (1982) IEEE Electron Device Lett. , vol.3 , pp. 111
- Reeves, G.K.¹ Harrison, H.B.²

13
- 0343652519
- Marlow G S and Das M B 1982 Solid-State Electron. 55 91
- (1982) Solid-state Electron. , vol.55 , pp. 91
- Marlow, G.S.¹ Das, M.B.²

14
- 0003896938
- New York: McGraw-Hill
- Runyan W R 1973 Semiconductor Measurements and Instrumentation (New York: McGraw-Hill) p 69
- (1973) Semiconductor Measurements and Instrumentation , pp. 69
- Runyan, W.R.¹

15
- 0000067957
- Ruvimov S, Liliental-Weber Z, Washburn J, Qiao D, Lau S S and Chu P K 1998 Appl. Pltvs. Lett. 73 2582
- (1998) Appl. Pltvs. Lett. , vol.73 , pp. 2582
- Ruvimov, S.¹ Liliental-Weber, Z.² Washburn, J.³ Qiao, D.⁴ Lau, S.S.⁵ Chu, P.K.⁶

16
- 0001246773
- Luther B P, DeLucca J M, Mohney S E and Karlicek R F 1997 Appl. Phys. Lett. 71 3859
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3859
- Luther, B.P.¹ Delucca, J.M.² Mohney, S.E.³ Karlicek, R.F.⁴

17
- 51249163482
- Okamoto H 1993 J. Phase Equilibria 14 120
- (1993) J. Phase Equilibria , vol.14 , pp. 120
- Okamoto, H.¹

18
- 0025452370
- Colgan E G 1990 Mater. Sci. Rep. 4 1
- (1990) Mater. Sci. Rep. , vol.4 , pp. 1
- Colgan, E.G.¹

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