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Volumn 29, Issue 5, 2000, Pages 603-606

Comparison between TiAl and TiAlNiAu ohmic contacts to n-type GaN

(9) Boudart, B a Trassaert, S a Wallart, X a Pesant, J C a Yaradou, O a Theron D a Crosnier, Y a Lahreche, H b Omnes, F b

a INSTITUT D ELECTRONIQUE (France)

b CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; EVAPORATION; METALLIZING; MORPHOLOGY; OHMIC CONTACTS; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

CONTACT RESISTIVITY; ELECTRON-BEAM EVAPORATION;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0033750657 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-000-0052-1 Document Type: Article

Times cited : (37)

References (11)

1
- 21544435375
- J.S. Foresi and T.D. Moustakas, Appl. Phys. Lett. 62, 2859 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2859
- Foresi, J.S.¹ Moustakas, T.D.²

2
- 21544457842
- M.E. Lin, Z. Ma, F.Y. Huang, Z.F. Fan, L.H. Allen, and H. Morkoç, Appl. Phys. Lett. 64, 1003 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1003
- Lin, M.E.¹ Ma, Z.² Huang, F.Y.³ Fan, Z.F.⁴ Allen, L.H.⁵ Morkoç, H.⁶

3
- 3442882603
- Z. Fan, S.N. Mohammad, W. Kim, Ö. Aktas, A.E. Botchkarev, and H. Morkoç, Appl. Phys. Lett. 68, 1672 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1672
- Fan, Z.¹ Mohammad, S.N.² Kim, W.³ Aktas, Ö.⁴ Botchkarev, A.E.⁵ Morkoç, H.⁶

4
- 0038692476
- F. Ren, A.B. Emerson, S.J. Pearton, T.R. Fullowan, and J.M. Brown, Appl. Phys. Lett. 58, 1030 (1991).
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1030
- Ren, F.¹ Emerson, A.B.² Pearton, S.J.³ Fullowan, T.R.⁴ Brown, J.M.⁵

5
- 3843058900
- A.T. Ping, Q. Chen, J.W. Yang, M. Asif Khan, and I. Adesida, J. Electron. Mater. 27, 261 (1998).
- (1998) J. Electron. Mater. , vol.27 , pp. 261
- Ping, A.T.¹ Chen, Q.² Yang, J.W.³ Asif Khan, M.⁴ Adesida, I.⁵

6
- 0001230666
- B.P. Luther, S.E. Mohney, J.M. Delucca, and R.F. Karlicek, J. Electron. Mater. 27, 196 (1998).
- (1998) J. Electron. Mater. , vol.27 , pp. 196
- Luther, B.P.¹ Mohney, S.E.² Delucca, J.M.³ Karlicek, R.F.⁴

7
- 5644259934
- S. Ruvimov, Z. Liliental-Weber, J. Washburn, K.J. Duxstad, E.E. Haller, Z.F. Fan, S.N. Mohammad, W. Kim, A.E. Botchkarev, and H. Morkoç, Appl. Phys. Lett. 69, 1556 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1556
- Ruvimov, S.¹ Liliental-Weber, Z.² Washburn, J.³ Duxstad, K.J.⁴ Haller, E.E.⁵ Fan, Z.F.⁶ Mohammad, S.N.⁷ Kim, W.⁸ Botchkarev, A.E.⁹ Morkoç, H.¹⁰

8
- 0001246774
- B.P. Luther, S.E. Mohney, T.N. Jackson, M. Asif Khan, Q. Chen, and J.W. Yang, Appl. Phys. Lett. 70, 57 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 57
- Luther, B.P.¹ Mohney, S.E.² Jackson, T.N.³ Asif Khan, M.⁴ Chen, Q.⁵ Yang, J.W.⁶

9
- 0001246773
- B.P. Luther, J.M. Delucca, S. E. Mohney, and R. F. Karlicek, Appl. Phys. Lett. 71, 3859 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3859
- Luther, B.P.¹ Delucca, J.M.² Mohney, S.E.³ Karlicek, R.F.⁴

10
- 0003828439
- New York: John Wiley
- Practical Surface Analysis, 2nd edition, vol. 1, edited by D. Briggs and M.P. Seah (New York: John Wiley, 1990).
- (1990) Practical Surface Analysis, 2nd Edition , vol.1
- Briggs, D.¹ Seah, M.P.²

11
- 0000067957
- S. Ruvimov, Z. Liliental-Weber, J. Washburn, D. Qiao, S.S. Lau, and P.K. Chu, Appl. Phys. Lett. 73, 2582 (1998).
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2582
- Ruvimov, S.¹ Liliental-Weber, Z.² Washburn, J.³ Qiao, D.⁴ Lau, S.S.⁵ Chu, P.K.⁶

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